Study of the formation of a microrelief on ZnSe- and CdSe-crystal surfaces ablated by excimer KrF-laser radiaton
One-dimensional gratings with a period of are formed on the surfaces of CdSe and ZnSe crystals ablated by two interfering radiation beams of a nanosecond excimer KrF laser. Investigated are the dependences of the shape and depth of gratings on the energy density under irradiation by a single pulse,...
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Veröffentlicht in: | Quantum electronics (Woodbury, N.Y.) N.Y.), 2016-01, Vol.46 (10), p.903-910 |
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Hauptverfasser: | , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
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Zusammenfassung: | One-dimensional gratings with a period of are formed on the surfaces of CdSe and ZnSe crystals ablated by two interfering radiation beams of a nanosecond excimer KrF laser. Investigated are the dependences of the shape and depth of gratings on the energy density under irradiation by a single pulse, and on the number of pulses at a given energy density. The maximum grating depth is estimated as of the period. By forming a one-dimensional grating with a period of and a depth of on the CdSe-crystal surface, this surface becomes antireflective at a wavelength of . The surface reflectivity is reduced by 88 %. A possibility of forming two-dimensional gratings having periods of 1 and is demonstrated. |
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ISSN: | 1063-7818 1468-4799 |
DOI: | 10.1070/QEL16155 |