Study of the formation of a microrelief on ZnSe- and CdSe-crystal surfaces ablated by excimer KrF-laser radiaton

One-dimensional gratings with a period of are formed on the surfaces of CdSe and ZnSe crystals ablated by two interfering radiation beams of a nanosecond excimer KrF laser. Investigated are the dependences of the shape and depth of gratings on the energy density under irradiation by a single pulse,...

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Veröffentlicht in:Quantum electronics (Woodbury, N.Y.) N.Y.), 2016-01, Vol.46 (10), p.903-910
Hauptverfasser: Vartapetov, S.K., Zakhryapa, A.V., Kozlovsky, V.I., Korostelin, Yu.V., Mikhailov, V.A., Podmar'kov, Yu.P., Porofeev, I.Yu, Sviridov, D.E., Skasyrsky, Ya.K., Frolov, M.P., Yutkin, I.M.
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Sprache:eng
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Zusammenfassung:One-dimensional gratings with a period of are formed on the surfaces of CdSe and ZnSe crystals ablated by two interfering radiation beams of a nanosecond excimer KrF laser. Investigated are the dependences of the shape and depth of gratings on the energy density under irradiation by a single pulse, and on the number of pulses at a given energy density. The maximum grating depth is estimated as of the period. By forming a one-dimensional grating with a period of and a depth of on the CdSe-crystal surface, this surface becomes antireflective at a wavelength of . The surface reflectivity is reduced by 88 %. A possibility of forming two-dimensional gratings having periods of 1 and is demonstrated.
ISSN:1063-7818
1468-4799
DOI:10.1070/QEL16155