Two-dimensional FePS3 nanoelectromechanical resonators with local-gate electrostatic tuning at room temperature

Nanoelectromechanical systems (NEMS) enabled by two-dimensional (2D) magnetic materials are promising candidates for exploring ultrasensitive detection and magnetostrictive phenomena, thanks to their high mechanical stiffness, high strength, and ultralow mass. The resonance modes of such vibrating membrane NEMS can be probed optically and also manipulated mechanically via electrostatically induced strain. Electrostatic frequency tuning of 2D magnetic NEMS resonators is, thus, an important means of investigating magneto-mechanical coupling mechanisms. Toward realizing magneto-mechanical coupled devices, we build circular drumhead iron phosphorus trisulfide (FePS3) NEMS resonators with different diameters (3–7 μm). Here, we report on experimental demonstration of tunable antiferromagnet FePS3 drumhead resonators with the highest fractional frequency tuning range up to Δf/f0 = 32%. Combining experimental results and analytical modeling of the resonance frequency scaling, we attain quantitative understanding of the elastic behavior of FePS3, including the transition from “membrane” to “plate” regime, with built-in tension (γ) ranging from 0.1 to 2 N/m. This study not only offers methods for investigating mechanical properties of ultrathin membranes of magnetic 2D materials but also provides important guidelines for designing future high-performance magnetic NEMS resonators.