Local structure and ordering of Al atoms in Al x Ga1− x N epilayers

In this study, we investigate the local structure of aluminum (Al) in a comprehensive series of AlxGa1−xN epilayers, where the Al concentration spans from the dilute limit to 100%. We analyze grazing incidence Al K-edge tender x-ray absorption spectroscopy data using both linear combination fitting based on reference limit spectra and full quantitative analysis. The results indicate deviations from random cation distribution with varying signs within the explored concentration range. Additionally, we observe a reduction in cationic interatomic distances over a wide concentration range, which contrasts with some previous studies conducted at hard x-ray absorption edges.