Fabrication of Nb and MoGe SQUID-on-tip probes by magnetron sputtering

We demonstrate the fabrication of scanning superconducting quantum interference devices (SQUIDs) on the apex of sharp quartz scanning probes—known as SQUID-on-tip probes—using conventional magnetron sputtering. We produce and characterize SQUID-on-tips made of both Nb and MoGe with effective diameters ranging from 50 to 80 nm, magnetic flux noise down to 300 n Φ 0 / Hz, and operating fields as high as 2.5 T. Compared to the SQUID-on-tip fabrication techniques used until now, including thermal evaporation and collimated sputtering, this simplified method facilitates experimentation with different materials, potentially expanding the functionality and operating conditions of these sensitive nanometer-scale scanning probes.