Performance and uniformity of a kilo-pixel array of Ti/Au transition-edge sensor microcalorimeters

Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of x-ray space observatories. These arrays are required to achieve an energy resolution ΔE < 3 eV full width at half maximum (FWHM) in the soft x-ray energy range. We are currently developing x-ray microcalo...

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Veröffentlicht in:Review of scientific instruments 2021-02, Vol.92 (2), p.023101-023101
Hauptverfasser: Taralli, E., D’Andrea, M., Gottardi, L., Nagayoshi, K., Ridder, M. L., de Wit, M., Vaccaro, D., Akamatsu, H., Bruijn, M. P., Gao, J. R.
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container_issue 2
container_start_page 023101
container_title Review of scientific instruments
container_volume 92
creator Taralli, E.
D’Andrea, M.
Gottardi, L.
Nagayoshi, K.
Ridder, M. L.
de Wit, M.
Vaccaro, D.
Akamatsu, H.
Bruijn, M. P.
Gao, J. R.
description Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of x-ray space observatories. These arrays are required to achieve an energy resolution ΔE < 3 eV full width at half maximum (FWHM) in the soft x-ray energy range. We are currently developing x-ray microcalorimeter arrays for use in the future laboratory and space-based x-ray astrophysics experiments and ground-based spectrometers. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with 140 × 30 μm2 Ti/Au TESs with the Au x-ray absorber. We report on extensive measurements on 60 pixels in order to show the uniformity of our large TES array. The averaged critical temperature is Tc = 89.5 ± 0.5 mK, and the variation across the array (∼1 cm) is less than 1.5 mK. We found a large region of detector’s bias points between 20% and 40% of the normal-state resistance where the energy resolution is constantly lower than 3 eV. In particular, results show a summed x-ray spectral resolution ΔEFWHM = 2.50 ± 0.04 eV at a photon energy of 5.9 keV, measured in a single-pixel mode using a frequency domain multiplexing readout system developed at SRON/VTT at bias frequencies ranging from 1 MHz to 5 MHz. Moreover, we compare the logarithmic resistance sensitivity with respect to temperature and current (α and β, respectively) and their correlation with the detector’s noise parameter M, showing a homogeneous behavior for all the measured pixels in the array.
doi_str_mv 10.1063/5.0027750
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source AIP Journals Complete; Alma/SFX Local Collection
subjects Arrays
Astrophysics
Bias
Calorimeters
Critical temperature
Energy resolution
Multiplexing
Observatories
Pixels
Scientific apparatus & instruments
Sensor arrays
Soft x rays
Spectral resolution
Spectrometers
X ray spectra
title Performance and uniformity of a kilo-pixel array of Ti/Au transition-edge sensor microcalorimeters
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