Performance and uniformity of a kilo-pixel array of Ti/Au transition-edge sensor microcalorimeters

Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of x-ray space observatories. These arrays are required to achieve an energy resolution ΔE < 3 eV full width at half maximum (FWHM) in the soft x-ray energy range. We are currently developing x-ray microcalo...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Review of scientific instruments 2021-02, Vol.92 (2), p.023101-023101
Hauptverfasser: Taralli, E., D’Andrea, M., Gottardi, L., Nagayoshi, K., Ridder, M. L., de Wit, M., Vaccaro, D., Akamatsu, H., Bruijn, M. P., Gao, J. R.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of x-ray space observatories. These arrays are required to achieve an energy resolution ΔE < 3 eV full width at half maximum (FWHM) in the soft x-ray energy range. We are currently developing x-ray microcalorimeter arrays for use in the future laboratory and space-based x-ray astrophysics experiments and ground-based spectrometers. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with 140 × 30 μm2 Ti/Au TESs with the Au x-ray absorber. We report on extensive measurements on 60 pixels in order to show the uniformity of our large TES array. The averaged critical temperature is Tc = 89.5 ± 0.5 mK, and the variation across the array (∼1 cm) is less than 1.5 mK. We found a large region of detector’s bias points between 20% and 40% of the normal-state resistance where the energy resolution is constantly lower than 3 eV. In particular, results show a summed x-ray spectral resolution ΔEFWHM = 2.50 ± 0.04 eV at a photon energy of 5.9 keV, measured in a single-pixel mode using a frequency domain multiplexing readout system developed at SRON/VTT at bias frequencies ranging from 1 MHz to 5 MHz. Moreover, we compare the logarithmic resistance sensitivity with respect to temperature and current (α and β, respectively) and their correlation with the detector’s noise parameter M, showing a homogeneous behavior for all the measured pixels in the array.
ISSN:0034-6748
1089-7623
DOI:10.1063/5.0027750