Plasmonic nitridation of SiO2/Si(100) surface covered with gold nanoparticles via nitrogen plasma-produced radicals and light

In this work, the optical response of gold nanoparticles was used for radical-induced nitridation of a SiO2/Si(100) surface. High-quality SiON thin films were successfully formed via radicals and light from a low-temperature, low-pressure nitrogen inductively coupled plasma at low substrate temperat...

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