Effective elastic constants of thin-film tungsten-silicide from surface acoustic wave analysis

The dispersion of surface acoustic waves propagating on single-crystal (100) silicon substrates covered by thin films of tungsten-silicide has been investigated using an acoustic material signature technique at a frequency of 339 MHz. The tungsten-silicide layers (500–2500 Å) were deposited using a...

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Veröffentlicht in:	Applied physics letters 1987-01, Vol.50 (2), p.74-76
Hauptverfasser:	CREAN, G. M, GOLANSKI, A, OBERLIN, J. C
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physical properties of thin films, nonelectronic Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
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