Direct observation of resolidification from the surface upon pulsed-laser melting of amorphous silicon

Amorphized Si has been irradiated using a 7.5-ns frequency-doubled neodymium:yttrium aluminum garnet laser. For low energy density pulses, time-resolved reflectivity measurements and Rutherford backscattering spectrometry of Cu implantation profiles show that the melted layer solidifies from the sur...

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Veröffentlicht in:Applied physics letters 1986-05, Vol.48 (19), p.1252-1254
Hauptverfasser: BRUINES, J. J. P, VAN HAL, R. P. M, BOOTS, H. M. J, SINKE, W, SARIS, F. W
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Sprache:eng
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Zusammenfassung:Amorphized Si has been irradiated using a 7.5-ns frequency-doubled neodymium:yttrium aluminum garnet laser. For low energy density pulses, time-resolved reflectivity measurements and Rutherford backscattering spectrometry of Cu implantation profiles show that the melted layer solidifies from the surface as well as from the liquid-solid interface. From interferences in the reflectivity, growth from the surface is found to occur at a velocity of 1.5 m/s. At higher energy densities sufficient to obtain epitaxial regrowth of the amorphous layer, solidification from the surface does not occur.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.96995