Studies of excimer laser ablation of solids using a Michelson interferometer

A Michelson interferometer has been used as a direct quantitative probe for gas phase plasma formation in the UV excimer laser ablation of solids. Excimer laser fluence thresholds for plasma formation are determined and correlated with optical emission from electronically excited ablation fragments.

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Bibliographische Detailangaben
Veröffentlicht in:	Applied physics letters 1986-06, Vol.48 (24), p.1690-1692
Hauptverfasser:	WALKUP, R. E, JASINSKI, J. M, DREYFUS, R. W
Format:	Artikel
Sprache:	eng
Schlagworte:	Beam characteristics: profile, intensity, and power spatial pattern formation Exact sciences and technology Fundamental areas of phenomenology (including applications) Laser optical systems: design and operation Optics Physics
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	A Michelson interferometer has been used as a direct quantitative probe for gas phase plasma formation in the UV excimer laser ablation of solids. Excimer laser fluence thresholds for plasma formation are determined and correlated with optical emission from electronically excited ablation fragments.
ISSN:	0003-6951 1077-3118
DOI:	10.1063/1.96807