Picosecond, tunable ArF excimer laser source

Picosecond, tunable ArF excimer laser source

A 40-mJ ArF* laser with pulse duration ∼10 ps and spatial and spectral properties close to the transform limits is described. Substantial extraction of the available energy from the final amplifier is demonstrated, a fact providing direct evidence against the presence of significant nonlinear losses...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Appl. Phys. Lett.; (United States) 1982-12, Vol.41 (11), p.1032-1034
Hauptverfasser: Egger, H., Luk, T. S., Boyer, K., Muller, D. F., Pummer, H., Srinivasan, T., Rhodes, C. K.
Format: Artikel
Sprache:eng
Schlagworte:
AMPLIFIERS
ARGON COMPOUNDS
ARGON FLUORIDES
ELECTRONIC EQUIPMENT
ENERGY
ENERGY LOSSES
ENGINEERING
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
LASERS
LOSSES
NONLINEAR PROBLEMS
PULSES
RARE GAS COMPOUNDS 420300 > Engineering-- Lasers-- (-1989)
TUNING
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Beschreibung
Zusammenfassung:A 40-mJ ArF* laser with pulse duration ∼10 ps and spatial and spectral properties close to the transform limits is described. Substantial extraction of the available energy from the final amplifier is demonstrated, a fact providing direct evidence against the presence of significant nonlinear losses in the amplifying medium up to an intensity of ∼1 GW/cm.2
ISSN:0003-6951
1077-3118
DOI:10.1063/1.93383