Single-crystal Si films on SiO2 prepared by using a stationary graphite heater for lateral epitaxy by seeded solidification

Continuous single-crystal Si films on SiO2 have been prepared by a simplified version of the technique for lateral epitaxy by seeded solidification (LESS). The new method employs transient heating by a simple stationary graphite heater, while the original method utilized two graphite heaters, one of...

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Veröffentlicht in:Applied physics letters 1981-08, Vol.39 (4), p.308-310
Hauptverfasser: Fan, John C. C., Tsaur, B.-Y., Geis, M. W.
Format: Artikel
Sprache:eng
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Zusammenfassung:Continuous single-crystal Si films on SiO2 have been prepared by a simplified version of the technique for lateral epitaxy by seeded solidification (LESS). The new method employs transient heating by a simple stationary graphite heater, while the original method utilized two graphite heaters, one of which was moved during LESS processing. The Si films obtained by the one-heater method are comparable in crystal quality to those prepared by the two-heater method.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.92724