Single-crystal Si films on SiO2 prepared by using a stationary graphite heater for lateral epitaxy by seeded solidification
Continuous single-crystal Si films on SiO2 have been prepared by a simplified version of the technique for lateral epitaxy by seeded solidification (LESS). The new method employs transient heating by a simple stationary graphite heater, while the original method utilized two graphite heaters, one of...
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Veröffentlicht in: | Applied physics letters 1981-08, Vol.39 (4), p.308-310 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Continuous single-crystal Si films on SiO2 have been prepared by a simplified version of the technique for lateral epitaxy by seeded solidification (LESS). The new method employs transient heating by a simple stationary graphite heater, while the original method utilized two graphite heaters, one of which was moved during LESS processing. The Si films obtained by the one-heater method are comparable in crystal quality to those prepared by the two-heater method. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.92724 |