A magnification-continuous calibration method for SEM-based nanorobotic manipulation systems

Calibration for scanning electron microscope (SEM) based nanorobotic manipulation systems is important and difficult. Most current calibration methods are cumbersome because they require customized high precision calibration boards and repeated calibration procedures in different magnifications. This paper presents a convenient magnification-continuous calibration method with high precision for SEM-based nanorobotic manipulation systems. The projection matrix containing a continuous magnification factor is obtained by modifying the affine camera model. This facilitates the simplification of the parameter computing process. Movement features are used to align the moving axes of micropositioning stages and calibrate the system, which benefits for the realization of efficient automatic calibration. Three experiments are carried out, and the results demonstrate that the proposed method is effective and practical for calibrating SEM-based nanorobotic manipulation systems under a wide range of continuous magnifications. Experiments also confirm that high precision measurements can be conducted in different magnifications with only once calibration and the relative error is within 1%.