Optical performance of W/B4C multilayer mirror in the soft x-ray region

W/B4C x-ray multilayers (MLs) with 300 layer pairs and a period in the range of d = 2–1.6 nm are fabricated and investigated for the x-ray optical element in the soft x-ray regime. The structural analyses of the MLs are carried out by using hard x-ray reflectivity (HXR) measurements at 8.047 keV. We...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of applied physics 2018-03, Vol.123 (9)
Hauptverfasser: Pradhan, P. C., Majhi, A., Nayak, M.
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:W/B4C x-ray multilayers (MLs) with 300 layer pairs and a period in the range of d = 2–1.6 nm are fabricated and investigated for the x-ray optical element in the soft x-ray regime. The structural analyses of the MLs are carried out by using hard x-ray reflectivity (HXR) measurements at 8.047 keV. Well-defined successive higher order Bragg peaks (up to 3rd order) in HXR data collected up to glancing incidence angles of ∼9° reveal a good quality of the periodic structure. The ML mirrors have an average interface width of ∼0.35 nm and have a compressive residual stress of ∼0.183 GPa and 0. 827 GPa for d = 1.62 nm and d = 1.98 nm, respectively. MLs maintain structural stability over a long time, with a slight increase in interface widths of the W layers by 0.1 nm due to self-diffusion. Soft x-ray reflectivity (SXR) performances are evaluated in the energy range of 650 to 1500 eV. At energy ∼ 1489 eV, measured reflectivities (energy resolution, ΔE) are ∼ 10% (19 eV) and 4.5% (13 eV) at glancing incident angles of 12.07° and 15° for MLs having periods of 1.98 nm and 1.62 nm, respectively. The optical performance from 1600 eV to 4500 eV is theoretically analysed by considering the measured structural parameters. The structure-stress-optical performance is correlated on the basis of the mechanism of film growth. The implications of W/B4C MLs are discussed, particularly with respect to the development of ML optics with high spectral selectivity and reflectance for soft x-ray instruments.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.5018266