Molecular forces in electromechanical integrated electrostatic harmonic actuator

Authors invent an electromechanical integrated electrostatic harmonic actuator. It is more favorable for miniaturization of the electromechanical devices. As the dimensions of the actuator decreases, the effects of the Casimir and van der Waals forces become obvious. Here, effects of the molecular forces on the operating behavior of the actuator are investigated theoretically investigated by a parametric study. The equations of the radial displacements of the flexible ring and the output torque for the actuator are deduced for three different situations: only considering electrostatic force, considering electrostatic and van der Waals forces, and considering electrostatic and the Casimir forces. The effects of van der Waals or the Casimir force on the radial displacements of the flexible ring and the output torque for the actuator are analyzed. Results show that van der Waals or the Casimir forces has obvious effects on the output torque of the actuator for small structure dimension. The results are useful in theory and technique studies on further miniaturization of the actuator.