Mass spectrometric investigations of plasma chemical reactions in a radiofrequency discharge with Ar/C2H2 and Ar/C2H2/O2 gas mixtures

Plasma chemical reactions in complex Ar/C2H2 and Ar/C2H2/O2 radiofrequency plasmas with formation of nano-particles are investigated. Growing nano-particles cause a growth instability, which leads to temporal variations and a cyclic behaviour of plasma properties. Mass spectrometric observations show the consumption of C2H2 and the formation of polyacetylene C2nH2 molecules which increases with acetylene gas flow. The cycle frequency is a decreasing function of acetylene consumption. The addition of oxygen to the discharge reduces the cycle frequency and the formation of nano-particles and leads to the formation of CO and CO2 molecules presumably through the oxidation of C2H radicals which are formed in the discharge.