Design of sub-1g microelectromechanical systems accelerometers
This paper presents a design of microelectromechanical systems (MEMS) accelerometers for sensing sub-1g (g = 9.8 m/s2) acceleration. The accelerometer has a high-density proof mass to suppress the Brownian noise that dominates the output noise of the sensor. The low-temperature (
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| Veröffentlicht in: | Applied physics letters 2014-02, Vol.104 (7) |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | This paper presents a design of microelectromechanical systems (MEMS) accelerometers for sensing sub-1g (g = 9.8 m/s2) acceleration. The accelerometer has a high-density proof mass to suppress the Brownian noise that dominates the output noise of the sensor. The low-temperature ( |
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| ISSN: | 0003-6951 1077-3118 |
| DOI: | 10.1063/1.4865377 |