Effect of growth induced (non)stoichiometry on the thermal conductivity, permittivity, and dielectric loss of LaAlO3 films
The effect of growth-induced non-stoichiometry on the thermal and dielectric properties of pulsed-laser deposited LaAlO3 thin films is explored. The composition of the LaAlO3 films was characterized via X-ray photoelectron spectroscopy and Rutherford backscattering spectrometry and it is revealed th...
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Veröffentlicht in: | Applied physics letters 2013-08, Vol.103 (8) |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The effect of growth-induced non-stoichiometry on the thermal and dielectric properties of pulsed-laser deposited LaAlO3 thin films is explored. The composition of the LaAlO3 films was characterized via X-ray photoelectron spectroscopy and Rutherford backscattering spectrometry and it is revealed that small deviations in laser fluence result in deviations of cation stoichiometry as large as a few atomic percent. The thermal conductivity is also found to be especially sensitive to non-stoichiometry, with 3%-5% La-excess and La-deficiency resulting in 60%-80% reduction in thermal conductivity. The dielectric constant decreases and the loss tangent increases with increasing non-stoichiometry with differences between La-excess and La-deficiency. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4818718 |