Can the atomic yields oscillate during ion sputtering of an initially homogeneous multicomponent alloy?

We study the time evolution of the surface composition and the atomic sputter yields when a multicomponent alloy is bombarded with a broad ion beam. For a binary or a ternary alloy, the sputter yields approach steady-state values exponentially with time if the sputter yield of each atomic species is...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of applied physics 2013-07, Vol.114 (3)
Hauptverfasser: Mark Bradley, R., Mauser, Kelly W.
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:We study the time evolution of the surface composition and the atomic sputter yields when a multicomponent alloy is bombarded with a broad ion beam. For a binary or a ternary alloy, the sputter yields approach steady-state values exponentially with time if the sputter yield of each atomic species is proportional to its surface concentration. There may be two distinct stable steady-state solutions to the equations of motion for the sputtering of a binary alloy if the sputter yield of one of the atomic species is amplified. In the case of a ternary alloy, we give a hypothetical example that satisfies the minimal physical requirements and that yields long-lived oscillations in the sputter yields of the three atomic species.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4813520