Polymer embedded silicon nitride thermally tunable Bragg grating filters
Optical waveguides have been fabricated and investigated that employ silicon nitride as core and polymer as surrounding cladding material. Buried single-mode waveguides showed a propagation loss of ∼0.7 dB/cm at 1550 nm. Depending on the thickness of the silicon nitride core, the optical mode can be...
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Veröffentlicht in: | Applied physics letters 2013-05, Vol.102 (18) |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Optical waveguides have been fabricated and investigated that employ silicon nitride as core and polymer as surrounding cladding material. Buried single-mode waveguides showed a propagation loss of ∼0.7 dB/cm at 1550 nm. Depending on the thickness of the silicon nitride core, the optical mode can be designed to expand largely into the polymer cladding. Using such a low-confinement structure and a metal strip heater embedded in the polymer cladding material beneath the core region, efficient thermally tunable waveguide Bragg grating filters were demonstrated. Wavelength tuning >57 nm was achieved at ∼220 mW of electrical heating power. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4804604 |