Polymer embedded silicon nitride thermally tunable Bragg grating filters

Optical waveguides have been fabricated and investigated that employ silicon nitride as core and polymer as surrounding cladding material. Buried single-mode waveguides showed a propagation loss of ∼0.7 dB/cm at 1550 nm. Depending on the thickness of the silicon nitride core, the optical mode can be...

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Veröffentlicht in:Applied physics letters 2013-05, Vol.102 (18)
Hauptverfasser: Zhang, Ziyang, Liu, Dongliang, de Felipe, David, Liu, Anjin, Keil, Norbert, Grote, Norbert
Format: Artikel
Sprache:eng
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Zusammenfassung:Optical waveguides have been fabricated and investigated that employ silicon nitride as core and polymer as surrounding cladding material. Buried single-mode waveguides showed a propagation loss of ∼0.7 dB/cm at 1550 nm. Depending on the thickness of the silicon nitride core, the optical mode can be designed to expand largely into the polymer cladding. Using such a low-confinement structure and a metal strip heater embedded in the polymer cladding material beneath the core region, efficient thermally tunable waveguide Bragg grating filters were demonstrated. Wavelength tuning >57 nm was achieved at ∼220 mW of electrical heating power.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4804604