Measuring the fracture resistance of hard coatings
A way of characterizing cracking in a hard coating is described. Microscale double cantilever beams have been made by focused ion beam milling and compressed in situ using a nanoindenter. The method can account for frictional effects and is demonstrated first on single crystals of SiC and GaAs of kn...
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Veröffentlicht in: | Applied physics letters 2013-04, Vol.102 (17) |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | A way of characterizing cracking in a hard coating is described. Microscale double cantilever beams have been made by focused ion beam milling and compressed in situ using a nanoindenter. The method can account for frictional effects and is demonstrated first on single crystals of SiC and GaAs of known toughness, before studying cracking in CrN-based hard coatings. It is found that ultra-fine grained CrAlN/Si3N4 coatings have a toughness approximately twice that of a conventional CrN coating. Although grain-size effects are still unclear, in situ observations directly show crack interactions with particles of Cr and voids in the film. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4803928 |