Measuring the fracture resistance of hard coatings

A way of characterizing cracking in a hard coating is described. Microscale double cantilever beams have been made by focused ion beam milling and compressed in situ using a nanoindenter. The method can account for frictional effects and is demonstrated first on single crystals of SiC and GaAs of kn...

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Veröffentlicht in:Applied physics letters 2013-04, Vol.102 (17)
Hauptverfasser: Liu, S., Wheeler, J. M., Howie, P. R., Zeng, X. T., Michler, J., Clegg, W. J.
Format: Artikel
Sprache:eng
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Zusammenfassung:A way of characterizing cracking in a hard coating is described. Microscale double cantilever beams have been made by focused ion beam milling and compressed in situ using a nanoindenter. The method can account for frictional effects and is demonstrated first on single crystals of SiC and GaAs of known toughness, before studying cracking in CrN-based hard coatings. It is found that ultra-fine grained CrAlN/Si3N4 coatings have a toughness approximately twice that of a conventional CrN coating. Although grain-size effects are still unclear, in situ observations directly show crack interactions with particles of Cr and voids in the film.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4803928