Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonators

Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonators

Using stress-induced curved cantilevers to form double split-ring resonator (DSRR) in three-dimensional configuration, an electrically tunable microelectromechanical system (MEMS) based out-of-plane metamaterials THz filter is experimentally demonstrated and characterized. While the achieved tunable...

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Veröffentlicht in:Applied physics letters 2013-03, Vol.102 (11)
Hauptverfasser: Lin, Yu-Sheng, Qian, You, Ma, Fusheng, Liu, Zhen, Kropelnicki, Piotr, Lee, Chengkuo
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container_issue 11
container_start_page
container_title Applied physics letters
container_volume 102
creator Lin, Yu-Sheng
Qian, You
Ma, Fusheng
Liu, Zhen
Kropelnicki, Piotr
Lee, Chengkuo
description Using stress-induced curved cantilevers to form double split-ring resonator (DSRR) in three-dimensional configuration, an electrically tunable microelectromechanical system (MEMS) based out-of-plane metamaterials THz filter is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 V bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using released DSRR structures shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters.
doi_str_mv 10.1063/1.4798244
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title Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonators
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