Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonators

Using stress-induced curved cantilevers to form double split-ring resonator (DSRR) in three-dimensional configuration, an electrically tunable microelectromechanical system (MEMS) based out-of-plane metamaterials THz filter is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 V bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using released DSRR structures shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters.