Threshold voltage dependence on channel length in amorphous-indium-gallium-zinc-oxide thin-film transistors
A threshold voltage (Vth) dependence on channel length (L) is reported for amorphous-indium-gallium-zinc-oxide thin-film transistors (TFTs). Vth is found to shift negatively with decreasing L and the negative shift is drastic in TFTs with L
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Veröffentlicht in: | Applied physics letters 2013-02, Vol.102 (8) |
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creator | Han Kang, Dong Ung Han, Ji Mativenga, Mallory Hwa Ha, Su Jang, Jin |
description | A threshold voltage (Vth) dependence on channel length (L) is reported for amorphous-indium-gallium-zinc-oxide thin-film transistors (TFTs). Vth is found to shift negatively with decreasing L and the negative shift is drastic in TFTs with L |
doi_str_mv | 10.1063/1.4793996 |
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Vth is found to shift negatively with decreasing L and the negative shift is drastic in TFTs with L < 4 μm. Combined analysis of current-voltage (I-V) and capacitance-voltage (C-V) curves shows that the Fermi energy (EF) at flat band shifts towards the conduction band (EC) with decreasing L, hence the negative Vth shift. Using the same analysis, the flat band carrier density (nFB) is also found to increase with decreasing L, revealing unintentional doping of the channel by carrier diffusion from the n+ doped source and drain regions as the cause of the negative Vth shift.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.4793996</identifier><language>eng</language><ispartof>Applied physics letters, 2013-02, Vol.102 (8)</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c330t-17ec61ad0975c356f0a9efdff9a213b1e71c7ba152e95c9b816a9f0cca14f44f3</citedby><cites>FETCH-LOGICAL-c330t-17ec61ad0975c356f0a9efdff9a213b1e71c7ba152e95c9b816a9f0cca14f44f3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Han Kang, Dong</creatorcontrib><creatorcontrib>Ung Han, Ji</creatorcontrib><creatorcontrib>Mativenga, Mallory</creatorcontrib><creatorcontrib>Hwa Ha, Su</creatorcontrib><creatorcontrib>Jang, Jin</creatorcontrib><title>Threshold voltage dependence on channel length in amorphous-indium-gallium-zinc-oxide thin-film transistors</title><title>Applied physics letters</title><description>A threshold voltage (Vth) dependence on channel length (L) is reported for amorphous-indium-gallium-zinc-oxide thin-film transistors (TFTs). Vth is found to shift negatively with decreasing L and the negative shift is drastic in TFTs with L < 4 μm. Combined analysis of current-voltage (I-V) and capacitance-voltage (C-V) curves shows that the Fermi energy (EF) at flat band shifts towards the conduction band (EC) with decreasing L, hence the negative Vth shift. Using the same analysis, the flat band carrier density (nFB) is also found to increase with decreasing L, revealing unintentional doping of the channel by carrier diffusion from the n+ doped source and drain regions as the cause of the negative Vth shift.</description><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNotkLFOwzAUAC0EEqUw8AdeGVz86iSuR1QBRarEUubItZ8Tg2NHdoqAr4eKTqdbbjhCboEvgDfiHhaVVEKp5ozMgEvJBMDqnMw454I1qoZLclXK-5_WSyFm5GPXZyx9CpZ-pjDpDqnFEaPFaJCmSE2vY8RAA8Zu6qmPVA8pj306FOaj9YeBdTqEI398NCx9eYt06n1kzoeBTlnH4suUcrkmF06Hgjcnzsnb0-NuvWHb1-eX9cOWGSH4xECiaUBbrmRtRN04rhU665zSSxB7QAlG7jXUS1S1UfsVNFo5boyGylWVE3Ny9981OZWS0bVj9oPO3y3w9niphfZ0SfwCb6Nc1A</recordid><startdate>20130225</startdate><enddate>20130225</enddate><creator>Han Kang, Dong</creator><creator>Ung Han, Ji</creator><creator>Mativenga, Mallory</creator><creator>Hwa Ha, Su</creator><creator>Jang, Jin</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20130225</creationdate><title>Threshold voltage dependence on channel length in amorphous-indium-gallium-zinc-oxide thin-film transistors</title><author>Han Kang, Dong ; Ung Han, Ji ; Mativenga, Mallory ; Hwa Ha, Su ; Jang, Jin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c330t-17ec61ad0975c356f0a9efdff9a213b1e71c7ba152e95c9b816a9f0cca14f44f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Han Kang, Dong</creatorcontrib><creatorcontrib>Ung Han, Ji</creatorcontrib><creatorcontrib>Mativenga, Mallory</creatorcontrib><creatorcontrib>Hwa Ha, Su</creatorcontrib><creatorcontrib>Jang, Jin</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Han Kang, Dong</au><au>Ung Han, Ji</au><au>Mativenga, Mallory</au><au>Hwa Ha, Su</au><au>Jang, Jin</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Threshold voltage dependence on channel length in amorphous-indium-gallium-zinc-oxide thin-film transistors</atitle><jtitle>Applied physics letters</jtitle><date>2013-02-25</date><risdate>2013</risdate><volume>102</volume><issue>8</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>A threshold voltage (Vth) dependence on channel length (L) is reported for amorphous-indium-gallium-zinc-oxide thin-film transistors (TFTs). Vth is found to shift negatively with decreasing L and the negative shift is drastic in TFTs with L < 4 μm. Combined analysis of current-voltage (I-V) and capacitance-voltage (C-V) curves shows that the Fermi energy (EF) at flat band shifts towards the conduction band (EC) with decreasing L, hence the negative Vth shift. Using the same analysis, the flat band carrier density (nFB) is also found to increase with decreasing L, revealing unintentional doping of the channel by carrier diffusion from the n+ doped source and drain regions as the cause of the negative Vth shift.</abstract><doi>10.1063/1.4793996</doi><oa>free_for_read</oa></addata></record> |
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title | Threshold voltage dependence on channel length in amorphous-indium-gallium-zinc-oxide thin-film transistors |
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