N-channel carbon nanotube enabled vertical field effect transistors with solution deposited ZnO nanoparticle based channel layers

N-channel carbon nanotube enabled vertical field effect transistors (CN-VFETs) exploiting a solution deposited ZnO nanoparticle thin film as the channel material are demonstrated. Transistor performance benefits from a thermal anneal followed by an oxygen plasma treatment. The devices exhibit on/off...

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Veröffentlicht in:Applied physics letters 2012-04, Vol.100 (17), p.173514-173514-3
Hauptverfasser: Wang, Po-Hsiang, Liu, Bo, Shen, Yu, Zheng, Ying, McCarthy, Mitchell A., Holloway, Paul, Rinzler, Andrew G.
Format: Artikel
Sprache:eng
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Zusammenfassung:N-channel carbon nanotube enabled vertical field effect transistors (CN-VFETs) exploiting a solution deposited ZnO nanoparticle thin film as the channel material are demonstrated. Transistor performance benefits from a thermal anneal followed by an oxygen plasma treatment. The devices exhibit on/off ratios approaching 10 4 with output current densities exceeding 60 mA/cm 2 . Combined with p-channel organic CN-VFETs, the solution based processing could allow for the development of low-cost complementary circuits.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4709618