N-channel carbon nanotube enabled vertical field effect transistors with solution deposited ZnO nanoparticle based channel layers
N-channel carbon nanotube enabled vertical field effect transistors (CN-VFETs) exploiting a solution deposited ZnO nanoparticle thin film as the channel material are demonstrated. Transistor performance benefits from a thermal anneal followed by an oxygen plasma treatment. The devices exhibit on/off...
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Veröffentlicht in: | Applied physics letters 2012-04, Vol.100 (17), p.173514-173514-3 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | N-channel carbon nanotube enabled vertical field effect transistors (CN-VFETs) exploiting a solution deposited ZnO nanoparticle thin film as the channel material are demonstrated. Transistor performance benefits from a thermal anneal followed by an oxygen plasma treatment. The devices exhibit on/off ratios approaching 10
4
with output current densities exceeding 60 mA/cm
2
. Combined with p-channel organic CN-VFETs, the solution based processing could allow for the development of low-cost complementary circuits. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4709618 |