Interface stress in Au/Ni multilayers
The effect of intermixing on the apparent interface stress is studied in 〈111〉-textured dc-magnetron sputtered Au/Ni multilayers by use of two methods commonly used for determining interface stress. The method using profilometry and in-plane x-ray diffraction does not take intermixing into account a...
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Veröffentlicht in: | Journal of applied physics 2000-08, Vol.88 (3), p.1401-1406 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The effect of intermixing on the apparent interface stress is studied in 〈111〉-textured dc-magnetron sputtered Au/Ni multilayers by use of two methods commonly used for determining interface stress. The method using profilometry and in-plane x-ray diffraction does not take intermixing into account and yields an apparent interface stress of −8.46±0.99 J m−2. However, observed discrepancies between model calculations and measured high-angle x-ray diffractograms indicate intermixing, and by use of the profilometry and sin2 ψ method the real interface stress value of −2.69±0.43 J m−2 is found. This method also reveals a significant and systematic change of the stress-free lattice parameter of both constituents as a function of modulation period which is shown to account for the difference between the two findings. The method using in-plane diffraction is thus shown to be inapplicable to interface stress determinations in systems exhibiting a modulation period-dependent stress-free lattice parameter. Finally, a deviation of the interface stress in the Au/Ni sample with the smallest modulation period as compared to specimens with larger bilayer lengths is observed to be concurrent with a significant decrease in the interface roughness measured by x-ray reflectivity, which suggests that the deviation is of geometrical origin. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.373830 |