Calculation of gas heating in direct current argon glow discharges

A model is developed for self-consistently calculating the gas temperature in a direct current argon glow discharge, used for analytical spectroscopy. The power input into the argon gas due to elastic (i.e., kinetic energy transfer) collisions of Ar+ ions, and fast Ar atoms, sputtered Cu atoms and e...

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Veröffentlicht in:Journal of applied physics 2000-06, Vol.87 (12), p.8334-8344
Hauptverfasser: Bogaerts, Annemie, Gijbels, Renaat, Serikov, Vladimir V.
Format: Artikel
Sprache:eng
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Zusammenfassung:A model is developed for self-consistently calculating the gas temperature in a direct current argon glow discharge, used for analytical spectroscopy. The power input into the argon gas due to elastic (i.e., kinetic energy transfer) collisions of Ar+ ions, and fast Ar atoms, sputtered Cu atoms and electrons with the argon gas atoms is calculated with Monte Carlo models. This power input is used in a heat transfer model to calculate the gas temperature. The amount of power input, the contributions of the various input sources, and the resulting gas temperature are calculated for a wide range of voltages, pressures, and currents, typically applied in analytical spectroscopy. It is found that the temperature can increase significantly at high voltages, pressures, and currents (up to a factor of 3 compared to absolute room temperature).
ISSN:0021-8979
1089-7550
DOI:10.1063/1.373545