MoS 2 nanoparticle formation in a low pressure environment

Formation of MoS2 nanoparticles at pressures between 0.5 and 10 Torr has been studied. Two different chemistries for the particle nucleation are compared: one based on MoCl5 and H2S, and the other based on MoCl5 and S. In both cases particle formation has been studied in a thermal oven and in a radio-frequency discharge. Typically, the reaction rates at low pressures are too low for an efficient thermal particle production. At pressures below 10 Torr no particle production in the oven is achieved in H2S chemistry. In the more reactive chemistry based on sulfur, the optimal conditions for thermal particle growth are found at 10 Torr and low gas flows, using excess of hydrogen. In the radio-frequency discharge, nanoparticles are readily formed in both chemistries at 0.5 Torr and can be detected in situ by laser light scattering. In the H2S chemistry particles smaller than 100 nm diameter have been synthesized, the sulfur chemistry yields somewhat larger grains. Both in thermal and plasma-enhanced particle syntheses, using excess of hydrogen is beneficial for the stability and purity of the particles.