Influence of bending strains on radio frequency characteristics of flexible microwave switches using single-crystal silicon nanomembranes on plastic substrate

This letter presents radio frequency (RF) characterization of flexible microwave switches using single-crystal silicon nanomembranes (SiNMs) on plastic substrate under various uniaxial mechanical tensile bending strains. The flexible switches shows significant/negligible performance enhancement on s...

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Veröffentlicht in:Applied physics letters 2011-10, Vol.99 (15), p.153106-153106-3
Hauptverfasser: Qin, Guoxuan, Yuan, Hao-Chih, Celler, George K., Ma, Jianguo, Ma, Zhenqiang
Format: Artikel
Sprache:eng
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Zusammenfassung:This letter presents radio frequency (RF) characterization of flexible microwave switches using single-crystal silicon nanomembranes (SiNMs) on plastic substrate under various uniaxial mechanical tensile bending strains. The flexible switches shows significant/negligible performance enhancement on strains under on/off states from dc to 10GHz. Furthermore, an RF/microwave strain equivalent circuit model is developed and reveals the most influential factors, and un-proportional device parameters change with bending strains. The study demonstrates that flexible microwave single-crystal SiNM switches, as a simple circuit example towards the goal of flexible monolithic microwave integrated circuits, can be properly operated and modeled under mechanical bending conditions.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3651276