Total electron emission yield measurement of insulator by a scanning small detector

Due to the injection of primary electrons and the emission of secondary electrons in the surface layer of insulating materials, the target surface will be negatively or positively charged. A method by injecting a single pulse beam and using a small current detector for the total electron emission yield measurement of insulating material is proposed, which can avoid the influence from charged surface. Using the developed system, the total electron emission yield of 25 μ m thick polyimide film has been studied, as induced by a single 50 μ s pulse of primary electrons with energy up to 2500 eV.