A two-dimensional moment equations-based analysis of radio frequency capacitively coupled discharges

A two-dimensional moment equations-based analysis of radio frequency capacitively coupled discharges

A two-dimensional nonequilibrium fluid model is used to study plasma uniformity in radiofrequency capacitively coupled discharges. Results for argon and helium discharges are presented for 10 and 30 cm electrodes in terms of plasma density, electron and ion velocity vectors, and other characteristic...

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Veröffentlicht in:Journal of Applied Physics 1996-12, Vol.80 (12), p.7154-7156
Hauptverfasser: Meyyappan, M., Govindan, T. R., Kreskovsky, J. P.
Format: Artikel
Sprache:eng
Schlagworte:
ARGON
BOLTZMANN EQUATION
ELECTRIC DISCHARGES
FLUID MODELS
HELIUM
HIGH-FREQUENCY DISCHARGES
PHYSICS
PLASMA DENSITY
PLASMA SIMULATION
VELOCITY
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Beschreibung
Zusammenfassung:A two-dimensional nonequilibrium fluid model is used to study plasma uniformity in radiofrequency capacitively coupled discharges. Results for argon and helium discharges are presented for 10 and 30 cm electrodes in terms of plasma density, electron and ion velocity vectors, and other characteristics. The plasma properties are found to be uniform over most of the 30 cm electrode except in an edge zone.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.363737