GaN/SiC avalanche photodiodes

Near ultraviolet-sensitive separate absorption and multiplication avalanche photodiodes with GaN/SiC epitaxial layers grown on SiC substrate were fabricated. Dark current < 1 pA at 90% breakdown voltage, maximum multiplication gain of ∼10 5 , and responsivity exceeding 4.2 A/W at 365 nm were achi...

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Veröffentlicht in:Applied physics letters 2011-09, Vol.99 (13), p.131110-131110-3
Hauptverfasser: Zhou, Qiugui, McIntosh, Dion C., Lu, Zhiwen, Campbell, Joe C., Sampath, Anand V., Shen, Hongen, Wraback, Michael
Format: Artikel
Sprache:eng
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Zusammenfassung:Near ultraviolet-sensitive separate absorption and multiplication avalanche photodiodes with GaN/SiC epitaxial layers grown on SiC substrate were fabricated. Dark current < 1 pA at 90% breakdown voltage, maximum multiplication gain of ∼10 5 , and responsivity exceeding 4.2 A/W at 365 nm were achieved.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3636412