Impedance of porous Si

The impedance of photoelectrochemically etched n-Si was measured in a liquid junction made of a methanolic solution of oxidized and reduced dimethylferrocene. The results show that both the equivalent circuit and each of the individual elements are almost identical with those of the smooth Si that w...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of applied physics 1994-09, Vol.76 (6), p.3635-3639
Hauptverfasser: Shen, Wu-Mian, Tomkiewicz, Micha, Lévy-Clément, Claude
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The impedance of photoelectrochemically etched n-Si was measured in a liquid junction made of a methanolic solution of oxidized and reduced dimethylferrocene. The results show that both the equivalent circuit and each of the individual elements are almost identical with those of the smooth Si that was used as a substrate. These results were interpreted in terms of a depletion layer model in which the space-charge layer is present only at the bottom of the macropores and at the interface between the electrolyte and the smooth part of the substrate. The poles that separate the pores are completely depleted of majority carriers. The nanoporous layer that is deposited on top of the macropores and can be removed by KOH is completely transparent to the impedance measurements.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.357426