High- Q transverse-electric/transverse-magnetic photonic crystal nanobeam cavities

We experimentally demonstrate high quality factor dual-polarized photonic crystal nanobeam cavities. The free-standing nanobeams are fabricated in a 500 nm thick silicon layer, and are probed using both tapered optical fiber and free-space resonant scattering set-ups. We measure Q factors greater th...

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Veröffentlicht in:Applied physics letters 2011-03, Vol.98 (11), p.111117-111117-3
Hauptverfasser: McCutcheon, Murray W., Deotare, Parag B., Zhang, Yinan, Lončar, Marko
Format: Artikel
Sprache:eng
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Zusammenfassung:We experimentally demonstrate high quality factor dual-polarized photonic crystal nanobeam cavities. The free-standing nanobeams are fabricated in a 500 nm thick silicon layer, and are probed using both tapered optical fiber and free-space resonant scattering set-ups. We measure Q factors greater than 10 4 for both transverse magnetic (TM) and transverse electric modes, and observe fiber transmission drops as large as 1 − T = 0.8 at the TM mode resonances.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3568897