Vacuum ultraviolet spectroscopy study of excimer-laser-generated plasmas

The dispersed emission in the vacuum ultraviolet (VUV) (1200–3000 Å) from the plasma generated by the interaction of a KrF excimer laser with an Al and a YBa2Cu3O7 target has been measured. Emission spectra were collected as a function of distance above the target surface and as a function of laser...

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Veröffentlicht in:Journal of applied physics 1993-07, Vol.74 (1), p.53-61
Hauptverfasser: MEHLMAN, G, CHRISEY, D. B, BURKHALTER, P. G, HORWITZ, J. S, NEWMAN, D. A
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Sprache:eng
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Zusammenfassung:The dispersed emission in the vacuum ultraviolet (VUV) (1200–3000 Å) from the plasma generated by the interaction of a KrF excimer laser with an Al and a YBa2Cu3O7 target has been measured. Emission spectra were collected as a function of distance above the target surface and as a function of laser fluence. The qualitative features of the plasmas from the two different targets were similar. The character of the emission spectra changed from a pseudocontinuous emission at the target surface to discrete emission from singly, doubly ionized species as well as neutrals at distances greater than ∼1.5 mm. The spatial variation indicated two regions: a high-density sheath along the target where the core emission is close to blackbody; and beyond, a plasma with large opacity emitting a UV spectrum of intensity decreasing fast with distance. Estimates of the plasma temperature and density were between 2 and 4 eV and ∼1018/cm3, respectively.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.355267