The role of negative ions in the formation of particles in low-pressure plasmas

Large particles (tens of nm to tens of μm in diameter) are problematic in low-pressure (

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of applied physics 1993-07, Vol.74 (2), p.853-861
Hauptverfasser:	CHOI, S. J, KUSHNER, M. J
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Impurities in plasmas Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma properties Spray coating techniques Surface treatments
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Beschreibung
Zusammenfassung:	Large particles (tens of nm to tens of μm in diameter) are problematic in low-pressure (
ISSN:	0021-8979 1089-7550
DOI:	10.1063/1.354877