Charge trapping on different cuts of a single-crystalline α-SiO2

A scanning electron microscope is employed for the investigation of charging on different cuts of an α-SiO2. A method for the determination of trapped charges is proposed. Charging on different cuts is observed to decrease in the order of z cut, 30° cut, 45° cut, and 60° cut of the α-SiO2. This phen...

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Veröffentlicht in:Journal of applied physics 1993-08, Vol.74 (3), p.1944-1948
Hauptverfasser: GONG, H, LE GRESSUS, C, OH, K. H, DING, X. Z, ONG, C. K, TAN, B. T. G
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Sprache:eng
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Zusammenfassung:A scanning electron microscope is employed for the investigation of charging on different cuts of an α-SiO2. A method for the determination of trapped charges is proposed. Charging on different cuts is observed to decrease in the order of z cut, 30° cut, 45° cut, and 60° cut of the α-SiO2. This phenomenon is related to permittivity, defect density, and stress of the samples. Details of the experiments and the method of charge determination are given.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.354778