Development of micromagnetostrictive wireless controllable actuator

This paper reports the design, fabrication, and performance characterization of a magnetostrictive microworm actuator. The suggested worm actuator is partially coated with NiFe film of 10 μm thickness. This actuator consists of a body plate of 50 μm thickness and four legs fabricated using SU-8 spin coating together with development and bonding process. Three square sections of NiFe film of 10 μm thickness are in turn electroplated on the top and bottom sides of the SU-8 body. The external magnetic fields are controlled for sinusoidal form of 3 Hz frequency. For the magnetomechanical characterization of the film, the magnetic moment is examined using a vibrating sample magnetometer. For assaying the movement of the actuator, the curvatures of each section under the applied external magnetic field are measured using a microscope measurement system with electromagnet set. The results show wave shape movement and maximum contractile distance between the end tips of legs is 0.777 mm.