In   situ x-ray diffraction studies of YBa2Cu3O x

In   situ x-ray diffraction studies of YBa2Cu3O x

Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pre...

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Veröffentlicht in:Journal of applied physics 1992-11, Vol.72 (10), p.4798-4804
Hauptverfasser: Williams, S., Zheng, J. Q., Shih, M. C., Wang, X. K., Lee, S. J., Rippert, E. D., Maglic, S., Kajiyama, Hiroshi, Segel, D., Dutta, P., Chang, R. P. H., Ketterson, J. B., Roberts, T., Lin, Y., Kampwirth, R. T., Gray, K.
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Sprache:eng
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Zusammenfassung:Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.352093