Quantum conductance fluctuations in self-aligned, pinch-narrowed silicon metal-oxide-semiconductor field-effect transistors

We have investigated the electrical behavior of pinch-narrowed n- and p-channel accumulation mode metal-oxide-semiconductor field-effect transistors. The devices were fabricated using a conventional twin well complementary metal-oxide-semiconductor process with gate widths smaller than 2 μm. The wel...

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Veröffentlicht in:Journal of applied physics 1992-08, Vol.72 (3), p.1183-1185
Hauptverfasser: SLIMMER, D. A, LICINI, J. C, VAN CAMPEN, S. D, KWASNICK, R. F
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Sprache:eng
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Zusammenfassung:We have investigated the electrical behavior of pinch-narrowed n- and p-channel accumulation mode metal-oxide-semiconductor field-effect transistors. The devices were fabricated using a conventional twin well complementary metal-oxide-semiconductor process with gate widths smaller than 2 μm. The well known signature of mesoscopic behavior, nonmonotonic variation in the channel conductance versus gate voltage, is observed below 8 K in the p-channel devices. The amplitude of the fluctuations is consistent with the predictions of quantum conductance fluctuations.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.351800