Quantum conductance fluctuations in self-aligned, pinch-narrowed silicon metal-oxide-semiconductor field-effect transistors
We have investigated the electrical behavior of pinch-narrowed n- and p-channel accumulation mode metal-oxide-semiconductor field-effect transistors. The devices were fabricated using a conventional twin well complementary metal-oxide-semiconductor process with gate widths smaller than 2 μm. The wel...
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Veröffentlicht in: | Journal of applied physics 1992-08, Vol.72 (3), p.1183-1185 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We have investigated the electrical behavior of pinch-narrowed n- and p-channel accumulation mode metal-oxide-semiconductor field-effect transistors. The devices were fabricated using a conventional twin well complementary metal-oxide-semiconductor process with gate widths smaller than 2 μm. The well known signature of mesoscopic behavior, nonmonotonic variation in the channel conductance versus gate voltage, is observed below 8 K in the p-channel devices. The amplitude of the fluctuations is consistent with the predictions of quantum conductance fluctuations. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.351800 |