Dislocations and precipitates in gallium arsenide
A complete dislocation analysis on a large number of grown-in dislocations was performed on wafers taken from three different semi-insulating liquid encapsulation Czochralski GaAs single crystals. By determining the Burgers vector, line direction, and habit plane of nearly 800 dislocations a decisio...
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| Veröffentlicht in: | Journal of applied physics 1992-01, Vol.71 (2), p.620-629 |
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| container_title | Journal of applied physics |
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| creator | SCHLOSSMACHER, P URBAN, K RÜFER, H |
| description | A complete dislocation analysis on a large number of grown-in dislocations was performed on wafers taken from three different semi-insulating liquid encapsulation Czochralski GaAs single crystals. By determining the Burgers vector, line direction, and habit plane of nearly 800 dislocations a decision could be made on dislocation type, dislocation generation, and multiplication mechanisms. Taking into account possible dislocation reactions between stress-induced glide systems all detected glide systems could be explained. The influence of post-growth annealing on both dislocations and arsenic precipitates was also investigated. Little effect was found on dislocations. Arsenic precipitates, however, showed a different distribution in size and significant effects on fine structure giving information on their nucleation and growth mechanisms. |
| doi_str_mv | 10.1063/1.351346 |
| format | Article |
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| ispartof | Journal of applied physics, 1992-01, Vol.71 (2), p.620-629 |
| issn | 0021-8979 1089-7550 |
| language | eng |
| recordid | cdi_crossref_primary_10_1063_1_351346 |
| source | AIP Digital Archive |
| subjects | Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Direct observation of dislocations and other defects (etch pits, decoration, electron microscopy, x-ray topography, etc.) Exact sciences and technology Physics Structure of solids and liquids crystallography |
| title | Dislocations and precipitates in gallium arsenide |
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