Thermoelectric properties of lattice-matched AlInN alloy grown by metal organic chemical vapor deposition

Thermoelectric properties of lattice-matched AlInN grown by metal organic chemical vapor deposition were measured and analyzed. The n-type Al 0.83 In 0.17 N alloy exhibited thermal conductivity of 4.87 W/(mK) measured by 3 ω differential method. The Seebeck coefficient of n-Al 0.83 In 0.17 N was measured as − 6.012 × 10 − 4 V / K by thermal gradient method. The sheet resistivity of n-Al 0.83 In 0.17 N was measured by using Van der Pauw method, and the electrical conductivity was measured as 2.38 × 10 4 / ( Ω m ) . The thermoelectric figure of merit ( Z ∗ T ) of n-type Al 0.83 In 0.17 N was measured as 0.532 at room temperature ( T = 300 K ) . The finding indicates lattice-matched AlInN alloy on GaN as excellent material candidate for thermoelectric application.