Wear properties of yttria-stabilized hafnia overcoats (abstract)
Yttria-stabilized hafnia is shown to be another transformation toughening ceramic with good tribological properties. The hafnia was rf-diode sputtered over a 300 nm chromium underlayer on textured aluminum-NiP 130 mm diameter substrates. Wear properties of the hafnia overcoat were evaluated, via con...
Gespeichert in:
Veröffentlicht in: | Journal of applied physics 1991-04, Vol.69 (8), p.5765-5765 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Yttria-stabilized hafnia is shown to be another transformation toughening ceramic with good tribological properties. The hafnia was rf-diode sputtered over a 300 nm chromium underlayer on textured aluminum-NiP 130 mm diameter substrates. Wear properties of the hafnia overcoat were evaluated, via contact start-stop (css) testing, as a function of oxygen partial pressure, substrate bias potential and argon pressure. Depending on deposition conditions, a wide range of wear properties were observed. Lower oxygen partial pressures |
---|---|
ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.347867 |