Wear properties of yttria-stabilized hafnia overcoats (abstract)

Yttria-stabilized hafnia is shown to be another transformation toughening ceramic with good tribological properties. The hafnia was rf-diode sputtered over a 300 nm chromium underlayer on textured aluminum-NiP 130 mm diameter substrates. Wear properties of the hafnia overcoat were evaluated, via con...

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Veröffentlicht in:Journal of applied physics 1991-04, Vol.69 (8), p.5765-5765
Hauptverfasser: Miller, M. S., Crist, J., Narayan, P. B., Skelcher, W. L.
Format: Artikel
Sprache:eng
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Zusammenfassung:Yttria-stabilized hafnia is shown to be another transformation toughening ceramic with good tribological properties. The hafnia was rf-diode sputtered over a 300 nm chromium underlayer on textured aluminum-NiP 130 mm diameter substrates. Wear properties of the hafnia overcoat were evaluated, via contact start-stop (css) testing, as a function of oxygen partial pressure, substrate bias potential and argon pressure. Depending on deposition conditions, a wide range of wear properties were observed. Lower oxygen partial pressures
ISSN:0021-8979
1089-7550
DOI:10.1063/1.347867