Theoretical and experimental characterization of positive-column plasmas in oxygen glow discharge

Theoretical and experimental characterization of positive-column plasmas in oxygen glow discharge

Combined theoretical and experimental studies have been accomplished in order to elucidate the features of positive columns in oxygen glow discharges. The Langmuir probe technique was utilized to measure the plasma parameters such as electron temperature and electric field. A tandem mass spectromete...

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Veröffentlicht in:Journal of applied physics 1990, Vol.67 (1), p.108-114
Hauptverfasser: ICHIKAWA, Y, WU, R. L. C, KANEDA, T
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Sprache:eng
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Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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container_end_page 114
container_issue 1
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container_title Journal of applied physics
container_volume 67
creator ICHIKAWA, Y
WU, R. L. C
KANEDA, T
description Combined theoretical and experimental studies have been accomplished in order to elucidate the features of positive columns in oxygen glow discharges. The Langmuir probe technique was utilized to measure the plasma parameters such as electron temperature and electric field. A tandem mass spectrometer was used to measure relative concentrations of charged particles. These experimental results were found to be in good agreement with the present theoretical calculations based on a slightly ionized stationary plasma model.
doi_str_mv 10.1063/1.345288
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subjects Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
title Theoretical and experimental characterization of positive-column plasmas in oxygen glow discharge
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