Theoretical and experimental characterization of positive-column plasmas in oxygen glow discharge

Combined theoretical and experimental studies have been accomplished in order to elucidate the features of positive columns in oxygen glow discharges. The Langmuir probe technique was utilized to measure the plasma parameters such as electron temperature and electric field. A tandem mass spectromete...

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Veröffentlicht in:Journal of applied physics 1990, Vol.67 (1), p.108-114
Hauptverfasser: ICHIKAWA, Y, WU, R. L. C, KANEDA, T
Format: Artikel
Sprache:eng
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Zusammenfassung:Combined theoretical and experimental studies have been accomplished in order to elucidate the features of positive columns in oxygen glow discharges. The Langmuir probe technique was utilized to measure the plasma parameters such as electron temperature and electric field. A tandem mass spectrometer was used to measure relative concentrations of charged particles. These experimental results were found to be in good agreement with the present theoretical calculations based on a slightly ionized stationary plasma model.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.345288