Cavity perturbation measurement of plasma density in complex geometry rf discharges

A noninvasive microwave diagnostic is used to determine the plasma density in a complex geometry rf discharge chamber. Data have been obtained using several cavity modes and a wide range of pressures and powers. The measured peak densities are approximately a factor of 2 lower than those obtained fr...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	J. Appl. Phys.; (United States) 1989-08, Vol.66 (4), p.1618-1621
Hauptverfasser:	MORONEY, R. M, LICHTENBERG, A. J, LIEBERMAN, M. A
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY 700102 - Fusion Energy- Plasma Research- Diagnostics CAVITY RESONATORS DISTURBANCES ELECTRIC DISCHARGES ELECTRIC PROBES ELECTROMAGNETIC RADIATION ELECTRONIC EQUIPMENT Exact sciences and technology HIGH-FREQUENCY DISCHARGES LANGMUIR PROBE MICROWAVE RADIATION Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges PLASMA DENSITY Plasma devices PLASMA DIAGNOSTICS PRESSURE DEPENDENCE PROBES RADIATIONS RESONATORS
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A noninvasive microwave diagnostic is used to determine the plasma density in a complex geometry rf discharge chamber. Data have been obtained using several cavity modes and a wide range of pressures and powers. The measured peak densities are approximately a factor of 2 lower than those obtained from Langmuir probe measurements.
ISSN:	0021-8979 1089-7550
DOI:	10.1063/1.344375