Variable angle of incidence spectroscopic ellipsometric characterization of TiO2/Ag/TiO2 optical coatings

Variable angle of incidence spectroscopic ellipsometric characterization of TiO2/Ag/TiO2 optical coatings

Optical constants (3000–8000 Å) and layer thicknesses of TiO2/Ag/TiO2 optical coatings are determined using variable angle of incidence spectroscopic ellipsometry. Ellipsometrically determined silver layer thicknesses agree well with those obtained by cross-sectional transmission electron microscopy...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of applied physics 1988-10, Vol.64 (7), p.3407-3410
Hauptverfasser: MEMARZADEH, K, WOOLLAM, J. A, BELKIND, A
Format: Artikel
Sprache:eng
Schlagworte:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Holography
Optics
Physics
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Optical constants (3000–8000 Å) and layer thicknesses of TiO2/Ag/TiO2 optical coatings are determined using variable angle of incidence spectroscopic ellipsometry. Ellipsometrically determined silver layer thicknesses agree well with those obtained by cross-sectional transmission electron microscopy. Also, spectral characteristics, absent in bulk silver data, are observed in n and k spectra for the thin silver layers. It is suggested that these structures may be caused by plasmon effects from the silver layers.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.342491