Origin of donor and acceptor species in undoped ZnSe grown by low-pressure metalorganic chemical vapor deposition

Effects of the [H2 Se]/[Dimethylzinc] source ratio on the electrical properties in the temperature range of 15–300 K and on the cathodoluminescence properties at 77 K have been investigated for undoped ZnSe films grown in one deposition run on (100)GaAs substrates at 350 °C by metalorganic chemical vapor deposition. The properties correlated with each other and depended on the degrees of deviation from stoichiometry. The dominant donor is identified with selenium vacancy from the dependence of donor concentration on the ratio and on the film thickness. Two kinds of acceptors were introduced according to the deviation from stoichiometry. They are tentatively associated with NSe and NaZn . Extended lattice defects which reduce the electron mobility are favored at the high ratios and they seem a principal factor of the high-resistive property of this material.