Photonic crystal cavities in silicon dioxide

One dimensional nanobeam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 10 4 are found via simulation, while quality factors of over 5 × 10 3 are found in experiment, for cavities with mode volumes of 2.0 ( λ / n ) 3...

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Veröffentlicht in:Applied physics letters 2010-01, Vol.96 (3), p.031107-031107-3
Hauptverfasser: Gong, Yiyang, Vučković, Jelena
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description One dimensional nanobeam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 10 4 are found via simulation, while quality factors of over 5 × 10 3 are found in experiment, for cavities with mode volumes of 2.0 ( λ / n ) 3 and in the visible wavelength range 600-716 nm. The dependences of the cavity quality factor and mode volume for different design parameters are also considered.
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title Photonic crystal cavities in silicon dioxide
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