Photonic crystal cavities in silicon dioxide
One dimensional nanobeam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 10 4 are found via simulation, while quality factors of over 5 × 10 3 are found in experiment, for cavities with mode volumes of 2.0 ( λ / n ) 3...
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| Veröffentlicht in: | Applied physics letters 2010-01, Vol.96 (3), p.031107-031107-3 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | One dimensional nanobeam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over
10
4
are found via simulation, while quality factors of over
5
×
10
3
are found in experiment, for cavities with mode volumes of
2.0
(
λ
/
n
)
3
and in the visible wavelength range 600-716 nm. The dependences of the cavity quality factor and mode volume for different design parameters are also considered. |
|---|---|
| ISSN: | 0003-6951 1077-3118 |
| DOI: | 10.1063/1.3297877 |